主持科研项目 国家自然科学青年基金项目(51805135):基于硅片整体变形的磨削亚表面损伤定量评价方法研究。 中央高校基本科研业务费项目(JZ2017HGBZ0956),非线性域残余应力作用下的硅片变形规律研究。 获奖 2019年09月,获得威廉公司官网青年教师教学基本功比赛三等奖 2018年07月,获得英国威廉希尔公司优秀班主任称号 发表论文 [1] H. Liu, Q. Zhang, et al. Residual stress distribution of silicon wafers machined by rotational grinding based on molecular dynamics[J]. Journal of Manufacturing Processes. 2024, 119(10):565-573.(SCI 检索) [2] H. Liu, T. Yang, et al. Iterative method for obtaining nonuniform grinding-induced residual stress distribution of silicon wafers based on global deformation[J]. Materials Science in Semiconductor Processing. 2022, 150: 106971.(SCI 检索) [3] H. Liu, T. Yang, et al. Obtainment of Residual Stress Distribution from Surface Deformation under Continuity Constraints for Thinned Silicon Wafers[J]. Machines. 2021, 9(11): 284.(SCI 检索,Editor's Choice Article) [4] H. Liu, M. Dai, et al. Modified Stoney formula for determining stress within thin films on large-deformation isotropic circular plates[J]. AIP Advances. 2021, 11(12): 125009.(SCI 检索,期刊封面论文与Featured Article) [5] H. Liu, J. Zhou, et al. Evaluation of polishing-induced subsurface damage based on residual stress distribution via measured global surface deformation for thinned silicon wafers[J].Surface Topography-Metrology and Properties. 2021, 9(3).(SCI 检索) [6] H. Liu, J. Han, et al. Accurate determination of bifurcation points for ground silicon wafers considering anisotropy using FEM method[J]. Materials Research Express. 2019, 6(9): 95906.(SCI 检索) 授权发明专利 [1] 刘海军,周静等; 一种完全消除重力影响的薄基片变形测量装置,授权日期:2021-11-16,中国,ZL202010465671.0. [2] 刘海军,杨涛等;一种求解薄基片应力的方法,授权日期:2022-11-4,中国,ZL202110358535.6. [3] 刘海军,许明贤等;一种基于人体体感温度的电热毯及其非线性调温方法,授权日期:2022-7-29,中国,ZL202110406205.X. [4] 刘海军,杨涛等;一种求解大变形薄基片应力的方法,授权日期:2023-7-18,中国,ZL202111559536.3. [5] 刘海军,周静等;一种薄基片厚度方向残余应力分布获取方法,授权日期:2024-03-12,中国,ZL202111145152.7. 软件著作权 [1] 刘海军; 周静等; 求解薄基片残余应力软件, 2021SR0738858, 原始取得, 全部权利, 2021-4-8. [2] 刘海军; 谢龙先等; 圆薄基片形变应力状态预测系统, 2024SR1202324, 原始取得, 全部权利, 2024-8-19.
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